Paper Title:
Study of Polysilicon Produced by Solid Phase Crystallization of Hydrogenated Amorphous Silicon Deposited at High Rate
  Abstract

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Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
217-222
DOI
10.4028/www.scientific.net/SSP.67-68.217
Citation
G. Farhi, M. Aoucher, T. Mohammed-Brahim, "Study of Polysilicon Produced by Solid Phase Crystallization of Hydrogenated Amorphous Silicon Deposited at High Rate", Solid State Phenomena, Vols. 67-68, pp. 217-222, 1999
Online since
April 1999
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