Paper Title:
Large Area Device Quality Indium-Tin-Oxide Thin Films by Magnetron Sputterting
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
255-260
DOI
10.4028/www.scientific.net/SSP.67-68.255
Citation
P. Thilakan, E. Terzini, G. Nobile, S. Loreti, C. Minarini, T. Polichetti, G. Sasikala, "Large Area Device Quality Indium-Tin-Oxide Thin Films by Magnetron Sputterting", Solid State Phenomena, Vols. 67-68, pp. 255-260, 1999
Online since
April 1999
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Price
$32.00
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