Impurity Effect on the Dislocation DLTS Spectrum in Silicon |
| Journal |
Solid State Phenomena (Volumes 67 - 68) |
| Volume |
Polycrystalline Semiconductors V |
| Edited by |
J.H. Werner, H.P. Strunk, H.W. Schock |
| Pages |
27-32 |
| DOI |
10.4028/www.scientific.net/SSP.67-68.27 |
| Citation |
Olga V. Feklisova et al., 1999, Solid State Phenomena, 67-68, 27 |
| Authors |
Olga V. Feklisova, G. Mariani-Regula, Bernard Pichaud, Eugene B. Yakimov |
| Keywords |
Deep Level Transient Spectroscopy, Dislocations, Metal, Oxygen, Silicon |
| Full Paper |
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