Paper Title:
Low-Temperature Silicon Epitaxy by Ion-Assisted Deposition
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
459-464
DOI
10.4028/www.scientific.net/SSP.67-68.459
Citation
L. Oberbeck, R.B. Bergmann, N. Jensen, S. Oelting, J. Werner, "Low-Temperature Silicon Epitaxy by Ion-Assisted Deposition", Solid State Phenomena, Vols. 67-68, pp. 459-464, 1999
Online since
April 1999
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Price
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