Paper Title:
Cubic Silicon Carbide Films Grown by Reactive Magnetron Sputtering at Relatively Low Temperature
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
477-484
DOI
10.4028/www.scientific.net/SSP.67-68.477
Citation
S. Kerdiles, F. Gourbilleau, R. Rizk, J.L. Pérez-Rodríguez, B. Garrido, O. González-Varona, L. Calvo-Barrio, J.R. Morante, "Cubic Silicon Carbide Films Grown by Reactive Magnetron Sputtering at Relatively Low Temperature", Solid State Phenomena, Vols. 67-68, pp. 477-484, 1999
Online since
April 1999
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