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Wet-Chemically Passivated Silicon Interfaces: Characterization by Surface Photovoltage Measurements, and Spectroscopic Ellipsometry Methods

Journal Solid State Phenomena (Volumes 67 - 68)
Volume Polycrystalline Semiconductors V
Edited by J.H. Werner, H.P. Strunk, H.W. Schock
Pages 515-520
DOI 10.4028/www.scientific.net/SSP.67-68.515
Citation H. Angermann et al., 1999, Solid State Phenomena, 67-68, 515
Authors H. Angermann, W. Henrion, A. Röseler, M. Rebien
Keywords Ellipsometry, Silicon, Surface Morphology, Surface Photovoltage Measurements, Surface State Distribution
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