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Leakage Current of Unhydrogenated Solid Phase Crystallized Silicon Thin Film Transistors

Journal Solid State Phenomena (Volumes 67 - 68)
Volume Polycrystalline Semiconductors V
Edited by J.H. Werner, H.P. Strunk, H.W. Schock
Pages 541-546
DOI 10.4028/www.scientific.net/SSP.67-68.541
Citation B. Tala-Ighil et al., 1999, Solid State Phenomena, 67-68, 541
Authors B. Tala-Ighil, A. Rahal, H. Toutah, T. Mohammed-Brahim, K. Mourgues, O. Bonnaud
Keywords Active Matrix Device, Solid Phase Crystallization, Thin Film Transistor
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