Paper Title:
W-Polycide Gates with a Thin Polysilicon Layer: Microstructure and Resistivity
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
583-0
DOI
10.4028/www.scientific.net/SSP.67-68.583
Citation
Y.O. Kim, J. Bevk, M. Furtsch, G.E. Georgiou, W. Mansfield, R. Masaitis, R. Opila, P.J. Silverman, "W-Polycide Gates with a Thin Polysilicon Layer: Microstructure and Resistivity", Solid State Phenomena, Vols. 67-68, pp. 583-0, 1999
Online since
April 1999
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Price
$32.00
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