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Gettering and Defect Engineering in Semiconductor Technology VIII

Volumes 69 - 70
doi: 10.4028/www.scientific.net/SSP.69-70
Paper Titles published in this Main Theme:
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Silicon Wafer Technology. Status and Overlook at the Millennium and a Decade Beyond

Authors: A.P. Mozer

1

Self-Assembling Si/SiGe Nanostructures for Light Emitters

Authors: K. Eberl, O.G. Schmidt, O. Kienzle, F. Ernst

13

The Origin and Efficiency of Dislocation Luminescence in Si and its Possible Application in Optoelectronics

Authors: E.A. Steinman, Vitaly V. Kveder, V.I. Vdovin, Hermann Grimmeiss

23

Acoustically Driven Optical Parameters in Ⅱ-Ⅵ Photonic Materials

Authors: I.V. Ostrovskii, O.A. Korotchenkov

33

Growth-Defects and Process-Induced Defects in SiGe-Based Heterostructures

Authors: Arne Nylandsted Larsen

43

Status, Hopes and Limitations for the Si: Er-based 1.54 μm Emitter

Authors: W. Jantsch, S. Lanzerstorfer, Margarita Stepikhova, H. Preier, L. Palmetshofer

53

Oxygen Precipitation Behaviour and Internal Gettering in Epitaxial and Polished Czochralski Silicon Wafers

Authors: Koji Sueoka, M. Akatsuka, Mitsuharu Yonemura, S. Sadamitsu, Eiichi Asayama, T. Ono, Y. Koike, H. Katahama

63

Grown-in Defects in High Temperature Annealed Si Wafers

Authors: N. Tsuchiya, Hideyoshi Matsushita, J. Sugamoto, Akira Kawasaki, Hiroshi Kubota

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Hydrogen Platelets in Crystalline Silicon - Precursors for the 'Smart Cut'

Authors: Sokrates T. Pantelides, F.A. Reboredo

83

Relaxation of Misfit Induced Strain in Si-Based Heterostructures

Authors: S.H. Christiansen, Horst P. Strunk, H. Wawra, M. Becker, M. Albrecht

93

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