Paper Title:
Silicon Wafer Technology. Status and Overlook at the Millennium and a Decade Beyond
| Periodical |
Solid State Phenomena (Volumes 69 - 70)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology VIII
|
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
1-12 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.1 |
| Citation |
A.P. Mozer, 1999, Solid State Phenomena, 69-70, 1 |
| Authors |
A.P. Mozer |
| Keywords |
Microelectronics, Silicon Wafer Technology, Technology Roadmap |
| Price |
US$ 28,- |