Paper Title:

Silicon Wafer Technology. Status and Overlook at the Millennium and a Decade Beyond

Periodical Solid State Phenomena (Volumes 69 - 70)
Main Theme Gettering and Defect Engineering in Semiconductor Technology VIII
Edited by H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages 1-12
DOI 10.4028/www.scientific.net/SSP.69-70.1
Citation A.P. Mozer, 1999, Solid State Phenomena, 69-70, 1
Authors A.P. Mozer
Keywords Microelectronics, Silicon Wafer Technology, Technology Roadmap
Price US$ 28,-
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