Silicon Wafer Technology. Status and Overlook at the Millennium and a Decade Beyond |
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| Journal | Solid State Phenomena (Volumes 69 - 70) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by | H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages | 1-12 |
| DOI | 10.4028/www.scientific.net/SSP.69-70.1 |
| Citation | A.P. Mozer, 1999, Solid State Phenomena, 69-70, 1 |
| Authors | A.P. Mozer |
| Keywords | Microelectronics, Silicon Wafer Technology, Technology Roadmap |
| Full Paper | 
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