Defect Engineering in the Development of Advanced Silicon Crystals and Wafers |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
111-120 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.111 |
| Citation |
Jan Vanhellemont, 1999, Solid State Phenomena, 69-70, 111 |
| Authors |
Jan Vanhellemont |
| Keywords |
Annealed Wafer, COP, Czochralski Silicon, Denuded Zones, GOI, Grown-in Defects, Internal Gettering, RTA, Silicon Oxide (SiO), Void |
| Full Paper |
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