Paper Title:
Electrical Characterization of As-Grown and Thermally Treated 8'' Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
143-148
DOI
10.4028/www.scientific.net/SSP.69-70.143
Citation
A. Castaldini, D. Cavalcoli, A. Cavallini, S. Pizzini, E. Susi, "Electrical Characterization of As-Grown and Thermally Treated 8'' Silicon Wafers", Solid State Phenomena, Vols. 69-70, pp. 143-148, 1999
Online since
August 1999
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Price
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