Electrical Characterization of As-Grown and Thermally Treated 8'' Silicon Wafers |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
143-148 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.143 |
| Citation |
Antonio Castaldini et al., 1999, Solid State Phenomena, 69-70, 143 |
| Authors |
Antonio Castaldini, Daniela Cavalcoli, Anna Cavallini, Sergio Pizzini, E. Susi |
| Keywords |
Deep Level, Diffusion Length, Surface Recombination Velocity |
| Full Paper |
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