Improved Microwave Absorption Technique for Bulk and Surface Lifetime Analysis in Processed Si Wafers |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
155-160 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.155 |
| Citation |
Eugenijus Gaubas et al., 1999, Solid State Phenomena, 69-70, 155 |
| Authors |
Eugenijus Gaubas, Eddy Simoen, C. Claeys, A. Poyai |
| Keywords |
Carrier Lifetime, Co-Silicided n+p Junction Diodes, Microwave Absorption |
| Full Paper |
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