Paper Title:
Defect Control in Nitrogen Doped Czochralski Silicon Crystals
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
161-166
DOI
10.4028/www.scientific.net/SSP.69-70.161
Citation
A. Ikari, K. Nakai, Y. Tachikawa, H. Deai, Y. Hideki, Y. Ohta, N. Masahashi, S. Hayashi, T. Hoshino, W. Ohashi, "Defect Control in Nitrogen Doped Czochralski Silicon Crystals", Solid State Phenomena, Vols. 69-70, pp. 161-166, 1999
Online since
August 1999
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Price
$32.00
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