Shallower Thermal Donor and Nitrogen-Oxygen Complex in Nitrogen Doped Czochralski Silicon |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
197-202 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.197 |
| Citation |
De Ren Yang et al., 1999, Solid State Phenomena, 69-70, 197 |
| Authors |
De Ren Yang, Jie Zhang, L. Li, Duan Lin Que |
| Keywords |
Nitrogen, Shallow Thermal Donors, Silicon |
| Full Paper |
Get the full paper by clicking here
|
