Radiation Defects Formation in Si |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
209-214 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.209 |
| Citation |
Lyudmila I. Khirunenko et al., 1999, Solid State Phenomena, 69-70, 209 |
| Authors |
Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin, Nikolay V. Abrosimov, M. Höhne, W. Schröder |
| Keywords |
Annealing, Defect, Germanium, Irradiation, Silicon, Solid Solution |
| Full Paper |
Get the full paper by clicking here
|
