Oxygen and Peculiarities of its Precipitation in Si |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
215-220 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.215 |
| Citation |
Lyudmila I. Khirunenko et al., 1999, Solid State Phenomena, 69-70, 215 |
| Authors |
Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin, Nikolay V. Abrosimov, M. Höhne, W. Schröder |
| Keywords |
Germanium, Oxygen, Silicon, Solid Solution, Thermal Donor |
| Full Paper |
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