Paper Title:
Vacancy-Gettering in Silicon: Cavities and Helium-Implantation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
229-234
DOI
10.4028/www.scientific.net/SSP.69-70.229
Citation
F. Corni, R. Tonini, S. Frabboni, C. Nobili, G. Calzolari, S. Masetti, P. Tamarozzi, G. Pavia, G.F. Cerofolini, "Vacancy-Gettering in Silicon: Cavities and Helium-Implantation", Solid State Phenomena, Vols. 69-70, pp. 229-234, 1999
Online since
August 1999
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Price
$32.00
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