Vacancy-Gettering in Silicon: Cavities and Helium-Implantation |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
229-234 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.229 |
| Citation |
F. Corni et al., 1999, Solid State Phenomena, 69-70, 229 |
| Authors |
F. Corni, R. Tonini, S. Frabboni, C. Nobili, G. Calzolari, S. Masetti, P. Tamarozzi, Giuseppe Pavia, G.F. Cerofolini |
| Keywords |
Defect Engineering, Ion-Implantation, Si:He, Vacancy Gettering, Void |
| Full Paper |
Get the full paper by clicking here
|
