Paper Title:
Gettering Centres for Metals and Oxygen Formed in MeV-Ion-Implanted and Annealed Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
235-240
DOI
10.4028/www.scientific.net/SSP.69-70.235
Citation
R. Kögler, A. Peeva, W. Anwand, P. Werner, A.B. Danilin, W. Skorupa, "Gettering Centres for Metals and Oxygen Formed in MeV-Ion-Implanted and Annealed Silicon", Solid State Phenomena, Vols. 69-70, pp. 235-240, 1999
Online since
August 1999
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Price
$32.00
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