Iron Gettering on Cavities Produced by Helium Implantation |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
241-246 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.241 |
| Citation |
F. Roqueta et al., 1999, Solid State Phenomena, 69-70, 241 |
| Authors |
F. Roqueta, A. Grob, J.J. Grob, Christiane Dubois, J. Fauré, Laurent Ventura |
| Keywords |
Dislocations, Helium, Impurity Gettering, Ion-Implantation, Silicon, Void |
| Full Paper |
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