Paper Title:

Gettering at Vacancy and Interstitial-Rich Regions in MeV Ion Implanted Silicon

Periodical Solid State Phenomena (Volumes 69 - 70)
Main Theme Gettering and Defect Engineering in Semiconductor Technology VIII
Edited by H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages 247-252
DOI 10.4028/www.scientific.net/SSP.69-70.247
Citation K.L. Beaman et al., 1999, Solid State Phenomena, 69-70, 247
Authors K.L. Beaman, J.M. Glasko, Sergei V. Koveshnikov, George A. Rozgonyi
Keywords Fe, Gettering, Ion Implantation, MeV, Rp/2, Thermal Stability
Price US$ 28,-
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