Gettering Strength Assessment Based on Lifetime Measurements |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
259-266 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.259 |
| Citation |
F.G. Kirscht et al., 1999, Solid State Phenomena, 69-70, 259 |
| Authors |
F.G. Kirscht, B. Orschel, V. Higgs, A. Buczkowski |
| Keywords |
BMD, Bulk Defects, Fe, Injection Level Spectroscopy, Internal and External Gettering, Iron, Oi, OPP, Oxygen Precipitation, Photo-Luminescence, PLM, Polycrystalline Diamond (PCD), Poly-Si |
| Full Paper |
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