Impurity Gettering Investigation in the Si-SiO2 System |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
267-272 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.267 |
| Citation |
Daniel Kropman et al., 1999, Solid State Phenomena, 69-70, 267 |
| Authors |
Daniel Kropman, V. Poll, L. Tambek, Tiit Kärner, U. Abru, M. Strik |
| Keywords |
Defect, ESR, Gettering, Si-SiO2 |
| Full Paper |
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