Paper Title:
Impurity Gettering Investigation in the Si-SiO2 System
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
267-272
DOI
10.4028/www.scientific.net/SSP.69-70.267
Citation
D. Kropman, V. Poll, L. Tambek, T. Kärner, U. Abru, M. Strik, "Impurity Gettering Investigation in the Si-SiO2 System", Solid State Phenomena, Vols. 69-70, pp. 267-272, 1999
Online since
August 1999
Keywords
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Price
$35.00
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