Paper Title:
Computer Simulation of Gettering Induced Oxygen Redistribution in SOI Structures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
273-278
DOI
10.4028/www.scientific.net/SSP.69-70.273
Citation
V.G. Litovchenko, A.A. Efremov, C. Claeys, "Computer Simulation of Gettering Induced Oxygen Redistribution in SOI Structures", Solid State Phenomena, Vols. 69-70, pp. 273-278, 1999
Online since
August 1999
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Price
$32.00
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