Computer Simulation of Gettering Induced Oxygen Redistribution in SOI Structures |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
273-278 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.273 |
| Citation |
V.G. Litovchenko et al., 1999, Solid State Phenomena, 69-70, 273 |
| Authors |
V.G. Litovchenko, A.A. Efremov, C. Claeys |
| Keywords |
Buried Oxide, Carbon in Si, Defect Engineering, Gettering of Oxygen, Precipitation, SiO2, Vacancy |
| Full Paper |
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