Surface Gettering Background Impurities and Defects in GaAs Plates |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
279-284 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.279 |
| Citation |
N. Shmidt et al., 1999, Solid State Phenomena, 69-70, 279 |
| Authors |
N. Shmidt, A.T. Gorelenok, Valentin V. Emtsev, Alex A. Kamanin, A.V. Markov, M. Mezdrogina, D.S. Poloskin, L. Vlasenko |
| Keywords |
Acceptor, Defect, Donors, GaAs, Gettering, Heat Treatment, Impurities, Microwave Photoconductivity, Y |
| Full Paper |
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