Gettering of Unintentionally Contaminated Silicon Wafers by Phosphorous Ion Implantation and Annealing |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
291-296 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.291 |
| Citation |
Marko Yli-Koski et al., 1999, Solid State Phenomena, 69-70, 291 |
| Authors |
Marko Yli-Koski, J. Mellin, V. Ovchinnikov |
| Keywords |
Gettering, Phosphorous Ion Implantation, Silicon, Surface Photo Voltage (SPV) |
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