Paper Title:
Gettering of Unintentionally Contaminated Silicon Wafers by Phosphorous Ion Implantation and Annealing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
291-296
DOI
10.4028/www.scientific.net/SSP.69-70.291
Citation
M. Yli-Koski, J. Mellin, V. Ovchinnikov, "Gettering of Unintentionally Contaminated Silicon Wafers by Phosphorous Ion Implantation and Annealing", Solid State Phenomena, Vols. 69-70, pp. 291-296, 1999
Online since
August 1999
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Price
$32.00
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