Oxygen and Carbon Clustering in Cz-Si during Electron Irradiation at Elevated Temperatures |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
297-302 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.297 |
| Citation |
J. Lennart Lindström et al., 1999, Solid State Phenomena, 69-70, 297 |
| Authors |
J. Lennart Lindström, T. Hallberg, J. Hermansson, L.I. Murin, V.P. Markevich, Mats Kleverman, Bengt G. Svensson |
| Keywords |
Electron Irradiation, Oxygen Dimer, Silicon, Vacancy Oxygen Defects |
| Full Paper |
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