About the Electrical Properties of Oxygen Phases Segregated by Annealing Cz Silicon in the 600-800°C Range |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
327-332 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.327 |
| Citation |
Eugene B. Yakimov et al., 1999, Solid State Phenomena, 69-70, 327 |
| Authors |
Eugene B. Yakimov, Olga V. Feklisova, Maurizio Acciarri, Anna Cavallini, Sergio Pizzini |
| Keywords |
DLTS, Energy Spectrum, Oxygen Precipitation, Silicon, Thermal Donor |
| Full Paper |
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