Paper Title:

About the Electrical Properties of Oxygen Phases Segregated by Annealing Cz Silicon in the 600-800°C Range

Periodical Solid State Phenomena (Volumes 69 - 70)
Main Theme Gettering and Defect Engineering in Semiconductor Technology VIII
Edited by H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages 327-332
DOI 10.4028/www.scientific.net/SSP.69-70.327
Citation Eugene B. Yakimov et al., 1999, Solid State Phenomena, 69-70, 327
Authors Eugene B. Yakimov, Olga V. Feklisova, Maurizio Acciarri, Anna Cavallini, Sergio Pizzini
Keywords DLTS, Energy Spectrum, Oxygen Precipitation, Silicon, Thermal Donor
Price US$ 28,-
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