Growth-Defects and Process-Induced Defects in SiGe-Based Heterostructures |
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| Journal | Solid State Phenomena (Volumes 69 - 70) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by | H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages | 43-52 |
| DOI | 10.4028/www.scientific.net/SSP.69-70.43 |
| Authors | Arne Nylandsted Larsen |
| Keywords | Defect, Silicon-Germanium (SiGe), Strain Relaxed |
| Full Paper | 
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