Paper Title:
Cu Determination in Silicon Wafers: A Comparison between Electrical and Chemical Measurements
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
461-466
DOI
10.4028/www.scientific.net/SSP.69-70.461
Citation
V. Raineri, D. Cali, M. Camalleri, M. Di Dio, A. Puglisi, "Cu Determination in Silicon Wafers: A Comparison between Electrical and Chemical Measurements", Solid State Phenomena, Vols. 69-70, pp. 461-466, 1999
Online since
August 1999
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.