Paper Title:
Identification of Process Induced Defects in Silicon Power Devices
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
539-544
DOI
10.4028/www.scientific.net/SSP.69-70.539
Citation
E. V. Astrova, V.A. Kozlov, A. A. Lebedev, V.B. Voronkov, "Identification of Process Induced Defects in Silicon Power Devices", Solid State Phenomena, Vols. 69-70, pp. 539-544, 1999
Online since
August 1999
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Price
$32.00
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