Paper Title:
Hydrogen-Enhanced Transformation of Eletrical and Structural Properties of Thin Subsurface Ion Implanted Silicon Layer in SiO2-Si Systems
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
595-0
DOI
10.4028/www.scientific.net/SSP.69-70.595
Citation
E.I. Terukov, B.J. Ber, V.K. Kudojarova, V.J. Davydov, A. Nazarov, J.N. Vovk, S. Ashok, "Hydrogen-Enhanced Transformation of Eletrical and Structural Properties of Thin Subsurface Ion Implanted Silicon Layer in SiO2-Si Systems", Solid State Phenomena, Vols. 69-70, pp. 595-0, 1999
Online since
August 1999
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Price
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