Paper Title:
Grown-in Defects in High Temperature Annealed Si Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 69-70)
Edited by
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages
73-82
DOI
10.4028/www.scientific.net/SSP.69-70.73
Citation
N. Tsuchiya, H. Matsushita, J. Sugamoto, A. Kawasaki, H. Kubota, "Grown-in Defects in High Temperature Annealed Si Wafers", Solid State Phenomena, Vols. 69-70, pp. 73-82, 1999
Online since
August 1999
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Price
$32.00
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