Hydrogen Platelets in Crystalline Silicon - Precursors for the 'Smart Cut' |
| Journal |
Solid State Phenomena (Volumes 69 - 70) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VIII |
| Edited by |
H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter |
| Pages |
83-92 |
| DOI |
10.4028/www.scientific.net/SSP.69-70.83 |
| Citation |
Sokrates T. Pantelides et al., 1999, Solid State Phenomena, 69-70, 83 |
| Authors |
Sokrates T. Pantelides, F.A. Reboredo |
| Keywords |
H, Hydrogenated Vacancies, Platelets, Silicon, Smart Cut |
| Full Paper |
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