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Relaxation of Misfit Induced Strain in Si-Based Heterostructures

Journal Solid State Phenomena (Volumes 69 - 70)
Volume Gettering and Defect Engineering in Semiconductor Technology VIII
Edited by H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Pages 93-102
DOI 10.4028/www.scientific.net/SSP.69-70.93
Citation S.H. Christiansen et al., 1999, Solid State Phenomena, 69-70, 93
Authors S.H. Christiansen, Horst P. Strunk, H. Wawra, M. Becker, M. Albrecht
Keywords Domes, Elastic Relaxation, GeSi/ Si, Huts, Island Metal Films, Islands, Liquid Phase Epitaxy (LPE), Misfit Strain, Ripples, Self-Assembly
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