Gettering and Defect Engineering in Semiconductor Technology VIII
Solid State Phenomena Volumes 69 - 70
doi:10.4028/www.scientific.net/SSP.69-70
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p519
Correlation between Intrinsic Stress Distribution and Crystallographic Defects Density Profile in Czochralski Silicon after CMOS Processing
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374 K
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Authors: T. Piotrowski, W. Jung
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p525
Silicon Impurity-Related Effects on Structural Defects in III-V Nitrides
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359 K
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Authors: N. Shmidt, V. Busov, Valentin V. Emtsev, R. Kyutt, W. Lundin, D.S. Poloskin, V.V. Ratnikov, A.V. Sakharov, A. Usikov
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p531
Reconstruction of Deep Level Defect Distribution from DLTS Measurements in Compensated Semiconductors
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342 K
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Authors: O.A. Soltanovich, Eugene B. Yakimov, Nikolai Yarykin
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p539
Identification of Process Induced Defects in Silicon Power Devices
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306 K
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Authors: Ekaterina V. Astrova, V.A. Kozlov, Alexander A. Lebedev, V.B. Voronkov
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p545
Nondestructive Defect Characterization and Engineering in Contemporary Silicon Power Devices
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360 K
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Authors: Pavel Hazdra, Jan Vobecký
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p551
Rapid Low Temperature Diode Fabrication on P-Type Czochralski Silicon on the Base of Simple Hydrogen Enhanced Thermal Donor Formation Processes
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490 K
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Authors: Reinhart Job, J.A. Weima, G. Grabosch, D. Borchert, Wolfgang R. Fahrner, V. Raiko, Alexander G. Ulyashin
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p557
Oriented Silicon Films on Glass Substrates for Device Applications
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558 K
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Authors: M.D. Efremov, Vladimir A. Volodin, V.V. Bolotov, A.V. Vishnyakov, O.K. Shabanova, D.I. Bragin, Liudmila I. Fedina, S.A. Kochubei
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p563
Radiation Induced Lattice Defects in InGaP/InGaAs P-HEMTs and their Effect on Device Performance
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276 K
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Authors: H. Ohyama, Eddy Simoen, Satoshi Kuroda, C. Claeys, Y. Takami, T. Hakata, H. Sunaga
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p571
Hydrogen Diffusion and Trapping in Microcrystalline Silicon
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225 K
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Authors: D. Ballutaud, L. Lusson, A. Boutry-Forveille, A. Lusson
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p577
Substrate Material for sub-0.25µm Si Technology Comparison of Hydrogen Annealed Wafers and Challengers: Evidence for Dopant Enhanced Diffusion
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206 K
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Authors: M.T. Bostelmann, B. Leroy
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p583
Atomic Structure of Chalcogen-Hydrogen Complexes in Silicon
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316 K
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Authors: C.A.J. Ammerlaan, P.T. Huy
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p589
Electric Properties of Hydrogenated Polycrystalline CdS-CdSe Solid Solution Films
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438 K
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Authors: A.K. Fedotov, S. Manego, A.V. Mazanik, M. Tarasik, Yu. Trofimov, Alexander G. Ulyashin, A. Yanchenko
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p595
Hydrogen-Enhanced Transformation of Eletrical and Structural Properties of Thin Subsurface Ion Implanted Silicon Layer in SiO2-Si Systems
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248 K
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Authors: E.I. Terukov, B.J. Ber, V.Kh. Kudojarova, V.Ju. Davydov, A.N. Nazarov, Ja.N. Vovk, S. Ashok