Intrinsic Point Defects and Grown-in Defects in Silicon |
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| Journal | Solid State Phenomena (Volume 71) |
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| Volume | Special Defects in Semiconducting Materials |
| Edited by | R.P. Agarwala |
| Pages | 1-22 |
| DOI | 10.4028/www.scientific.net/SSP.71.1 |
| Citation | Takahisa Okino, 1999, Solid State Phenomena, 71, 1 |
| Authors | Takahisa Okino |
| Keywords | Diffusion, Dopants, Frenkel Pairs, Grown-in Defects, Microdefect, Point Defect, Self-Interstitial, Semiconductor, Silicon, Vacancy |
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