Point Defect Assisted Diffusion in Semiconductors |
| Journal |
Solid State Phenomena (Volume 71) |
| Volume |
Special Defects in Semiconducting Materials |
| Edited by |
R.P. Agarwala |
| Pages |
23-50 |
| DOI |
10.4028/www.scientific.net/SSP.71.23 |
| Citation |
Jaroslaw Dąbrowski, 1999, Solid State Phenomena, 71, 23 |
| Authors |
Jaroslaw Dąbrowski |
| Keywords |
Boron, Compound Semiconductor, Diffusion, Doping, First-Principles Calculations, Gallium Arsenide, Heterostructures, Implantation, Intermixing, Interstitials, Silicon, Vacancy |
| Full Paper |
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