Diffusion and Electrical Properties of 3d Transition-Metal Impurities in Silicon |
| Journal |
Solid State Phenomena (Volume 71) |
| Volume |
Special Defects in Semiconducting Materials |
| Edited by |
R.P. Agarwala |
| Pages |
51-72 |
| DOI |
10.4028/www.scientific.net/SSP.71.51 |
| Citation |
H. Kitagawa, 1999, Solid State Phenomena, 71, 51 |
| Authors |
H. Kitagawa |
| Keywords |
3d Transition Metal, Diffusion Coefficient, Diffusion Mechanism, Electrical Property, Iron in N-Type Silicon, Silicon, Solubility |
| Full Paper |
Get the full paper by clicking here
|
