Defects and Contamination in Microelectronic Device Production: State-of-the-Art and Prospects |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
1-6 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.1 |
| Citation |
Bernd O. Kolbesen et al., 2001, Solid State Phenomena, 76-77, 1 |
| Authors |
Bernd O. Kolbesen, Hans Cerva, G. Zoth |
| Keywords |
Dislocations, DRAMs, Electrical Failures, Extended Crystalline Defects, Material Specifications, Metal Contamination, Metal Precipitates, Physical Analysis, Process Chemicals, Process Optimisation, Stacking Fault, TEM, Trenches, Tungsten Wormholes, Vertical Bird's Beak |
| Full Paper |
Get the full paper by clicking here
|
