Paper Title:
Defects and Contamination in Microelectronic Device Production: State-of-the-Art and Prospects
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
1-6
DOI
10.4028/www.scientific.net/SSP.76-77.1
Citation
B. O. Kolbesen, H. Cerva, G. Zoth, "Defects and Contamination in Microelectronic Device Production: State-of-the-Art and Prospects", Solid State Phenomena, Vols. 76-77, pp. 1-6, 2001
Online since
January 2001
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Price
$32.00
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