Defects and Contamination in Microelectronic Device Production: State-of-the-Art and Prospects |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 1-6 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.1 |
| Authors | Bernd O. Kolbesen, Hans Cerva, G. Zoth |
| Keywords | Dislocation, DRAMs, Electrical Failures, Extended Crystalline Defects, Material Specifications, Metal Contamination, Metal Precipitates, Physical Analysis, Process Chemicals, Process Optimization, Stacking Fault, Transmission Electron Microscopy (TEM), Trenches, Tungsten Wormholes, Vertical Bird's Beak |
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