Post SiN Etching Cleaning During Copper and Low K Integration |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
101-104 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.101 |
| Citation |
Alessio Beverina et al., 2001, Solid State Phenomena, 76-77, 101 |
| Authors |
Alessio Beverina, Didier Louis, C. Arvet, E. Lajoinie, Pascal Besson, C. Peyne, Douglas Holmes, D. Maloney, S. Lee, W.M. Lee |
| Keywords |
Cleaning, Copper (Cu), Low K |
| Full Paper |
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