Paper Title:
Wet Preparation of Defect-Free Hydrogen-Terminated Silicon Wafer Surface and Its Characterization in Atomic-Scale
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
105-110
DOI
10.4028/www.scientific.net/SSP.76-77.105
Citation
T. Takahagi, S. Shingubara, H. Sakaue, "Wet Preparation of Defect-Free Hydrogen-Terminated Silicon Wafer Surface and Its Characterization in Atomic-Scale", Solid State Phenomena, Vols. 76-77, pp. 105-110, 2001
Online since
January 2001
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Price
$32.00
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