Preparation and Characterization of Time Dependent Haze on Silicon Surfaces |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
115-118 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.115 |
| Citation |
N. Münter et al., 2001, Solid State Phenomena, 76-77, 115 |
| Authors |
N. Münter, Bernd O. Kolbesen, W. Storm, Timo Müller |
| Keywords |
Adhesion, Contamination, Pulsed Force Mode |
| Full Paper |
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