Paper Title:
Single Chemistry Cleaning Solution for Advanced Wafer Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
119-122
DOI
10.4028/www.scientific.net/SSP.76-77.119
Citation
R. Vos, O. Doll, A. Fester, B. O. Kolbesen, M. Lux, K. Kenis, B. Onsia, S. De Gendt, E. Schellkes, Z. Hatcher, P. W. Mertens, M. M. Heyns, "Single Chemistry Cleaning Solution for Advanced Wafer Cleaning", Solid State Phenomena, Vols. 76-77, pp. 119-122, 2001
Online since
January 2001
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Price
$32.00
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