Paper Title:
Behaviors of Metallic Contaminants in Si Wafer Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
123-126
DOI
10.4028/www.scientific.net/SSP.76-77.123
Citation
J. S. Jeon, S. De Gendt, S. Raghavan, M. Almanza-Workman, C. Gonsalves, B. Ogle, "Behaviors of Metallic Contaminants in Si Wafer Processing", Solid State Phenomena, Vols. 76-77, pp. 123-126, 2001
Online since
January 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.