Iron Bulk Concentration Effect on the Yield & Reliability of Thin Oxides |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces V |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 127-130 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.127 |
| Citation | Kah Keen Lai et al., 2001, Solid State Phenomena, 76-77, 127 |
| Authors | Kah Keen Lai, Chee Kong Leong, Hwee Ling Yeo |
| Keywords | Idd (Off-State Standby Current, J Factor (Current Density in A/cm2), Qbd (Charge to Breakdown) |
| Full Paper | 
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