Paper Title:
Modification of Low-K SiCOH Film Porosity by a HF Solution
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
135-138
DOI
10.4028/www.scientific.net/SSP.76-77.135
Citation
D. Shamiryan, M. R. Baklanov, G. Vereecke, S. Vanhaelemeersch, K. Maex, "Modification of Low-K SiCOH Film Porosity by a HF Solution", Solid State Phenomena, Vols. 76-77, pp. 135-138, 2001
Online since
January 2001
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Price
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