Layer-By-Layer Oxidation of Silicon |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces V |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 139-144 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.139 |
| Citation | Takeshi Hattori et al., 2001, Solid State Phenomena, 76-77, 139 |
| Authors | Takeshi Hattori, Kazuhiko Takahashi, H. Nohira, Tadahiro Ohmi |
| Full Paper | 
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