Paper Title:
Layer-By-Layer Oxidation of Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
139-144
DOI
10.4028/www.scientific.net/SSP.76-77.139
Citation
T. Hattori, K. Takahashi, H. Nohira, T. Ohmi, "Layer-By-Layer Oxidation of Silicon", Solid State Phenomena, Vols. 76-77, pp. 139-144, 2001
Online since
January 2001
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Price
$32.00
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