The Evolution of Chemical Oxides Into Ultrathin Oxides: A Spectroscopic Characterization |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
145-148 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.145 |
| Citation |
J. Eng et al., 2001, Solid State Phenomena, 76-77, 145 |
| Authors |
J. Eng, R.L. Opila, J.M. Rosamilia, B.J. Sapjeta, Y.J. Chabal, T. Boone, R. Masaitis, Thomas Sorsch, Martin L. Green |
| Keywords |
Spectroscopy, Ultrathin Silicon Oxides, Wet Chemical Oxides |
| Full Paper |
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