Paper Title:
Influence of Boron and Fluorine Incorporation on the Network Structure of Ultrathin SiO2
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
149-152
DOI
10.4028/www.scientific.net/SSP.76-77.149
Citation
S. Miyazaki, K. Morino, M. Hirose, "Influence of Boron and Fluorine Incorporation on the Network Structure of Ultrathin SiO2", Solid State Phenomena, Vols. 76-77, pp. 149-152, 2001
Online since
January 2001
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Price
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