Influence of Boron and Fluorine Incorporation on the Network Structure of Ultrathin SiO2 |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces V |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 149-152 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.149 |
| Citation | Seiichi Miyazaki et al., 2001, Solid State Phenomena, 76-77, 149 |
| Authors | Seiichi Miyazaki, Kazuhiro Morino, Masataka Hirose |
| Keywords | Impurity Pileup, SiO2/SiC Interface, Structural Relaxation |
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